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Fast wafer handling in the chip production industry.

Components for every cleanroom that improve technology and reduce costs

One igus® e-chain® of the E6 family accelerates the work sequences in the case of this application for wafer handling in the chip production industry. With the E6, the supply of energy at accelerations of up to 4 m/s2 and at speeds of up to 6 metres per second is not a problem. The minimum abrasion is also very important because a high degree of cleanliness is a decisive factor in the chip production industry. The E6 is cleanroom-suitable with IPA Fraunhofer certification.

Profile:

Industry: cleanroom / semiconductor
Application: Wafer handling
Product: e-chain® - E6
Requirements: The minimum abrasion is very important because a high degree of cleanliness is a decisive factor in the chip production industry.

Go to Cleanroom Overview

Wafer_1

Schmid Technology Systems, Marijan Strugar, Niedereschach, Germany

Selected products for the cleanroom industry

e-skin flat

Flat cable guidance system

Suitable for cleanroom IPA ISO Class 1
Modular and compact design
Cables can be replaced in minutes
Optionally with co-ordinated CFCLEAN stranded structure for high dependability

e-skin® soft

Two-piece corrugated tubes

Suitable for cleanroom according to IPA ISO Class 1
Two-piece, consisting of upper and lower shells
Fast assembly due to "zipper" opening function
For fast, short, unsupported applications

e-skin corrugated tubes

e-chain E6

e-chain for high dynamics

Cleanroom IPA ISO Class 1
Very quiet: 32dB(A) at 1m/s
Crossbars openable from both sides
Smooth, cable-friendly interior
Release pretension by turning the inner link

Application examples for the cleanroom

e-skin flat in use in a linear system with air bearings

Industry: Chip production/Semiconductor

e-skin flat in use in a linear system with air bearings

Solution: e-skin flat " - SKF12.4.03.01.1

Result: At as a 4-fold layer together with PVC & TPE cables from igus® ensures the reliable energy supply of an air bearing linear system.

Cleanroom application example semiconductors

Industry: Semiconductor manufacturing

e-chain® systems in semiconductor manufacturing

Solution: zipper e-chain® in a hanging installation position

Result: The patented zipper e-chain® system meets the required travel distance of about 290 mm, cycle numbers of 50-60 cycles per hour are achieved, usually in three-shift operation.

Cleanroom application example semiconductors

Industry: Chip production/Semiconductor

Wafer handling

Solution: e-chain® - E6

Result: With e-chain® - E6, the supply of energy for wafer handling in chip production involving acceleration rates of up to 4m/s² and speeds of up to 6m/s is not a problem.

Use in a laboratory unit for liquid handling.

Industry: Medical technology

drylin® TR high helix thread nuts for laboratory equipment

Solution: drylin TR high helix thread nuts

Result: drylin® TR high helix thread nuts were used in laboratory equipment for handling fluids. The advantage for the cleanroom is their low coefficient of friction, higher efficiency and no lubrication is necessary, which prevents contamination.

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